Dataset statistics
Number of variables | 19 |
---|---|
Number of observations | 137 |
Missing cells | 1 |
Missing cells (%) | < 0.1% |
Duplicate rows | 0 |
Duplicate rows (%) | 0.0% |
Total size in memory | 20.5 KiB |
Average record size in memory | 153.0 B |
Variable types
Text | 4 |
---|---|
Categorical | 15 |
Dataset
Description | 한국나노기술원에서 제공하는 나노소자팹 장비별 적용 가능한 기판 정보입니다.(장비명, 적용가능한 기판 종류, 사이즈, 기판유형, 기판 두께 등) * 장비 상세 정보 : 한국나노기술원_나노소자팹서비스 및 연구공정장비 정보(https://www.data.go.kr/data/15037530/fileData.do)에서 확인 가능합니다. |
---|---|
URL | https://www.data.go.kr/data/15088740/fileData.do |
기판두께(Normal) has constant value "" | Constant |
담당자 is highly overall correlated with 기판종류(III-V) and 8 other fields | High correlation |
기판종류(Si) is highly overall correlated with 기판종류(Glass) | High correlation |
기판종류(III-V) is highly overall correlated with 담당자 | High correlation |
기판종류(Glass) is highly overall correlated with 담당자 and 1 other fields | High correlation |
기판종류(Flex) is highly overall correlated with 담당자 | High correlation |
기판크기(2인치) is highly overall correlated with 담당자 and 1 other fields | High correlation |
기판크기(4인치) is highly overall correlated with 담당자 and 2 other fields | High correlation |
기판크기(6인치) is highly overall correlated with 담당자 and 1 other fields | High correlation |
기판크기(12인치) is highly overall correlated with 담당자 | High correlation |
기판유형(플랫) is highly overall correlated with 담당자 | High correlation |
기판유형(노치) is highly overall correlated with 담당자 | High correlation |
기판종류(Si) is highly imbalanced (54.7%) | Imbalance |
기판크기(12인치) is highly imbalanced (78.9%) | Imbalance |
기판유형(플랫) is highly imbalanced (59.5%) | Imbalance |
장비코드 has unique values | Unique |
장비명 has unique values | Unique |
Reproduction
Analysis started | 2023-12-12 06:29:12.238113 |
---|---|
Analysis finished | 2023-12-12 06:29:14.346176 |
Duration | 2.11 seconds |
Software version | ydata-profiling vv4.5.1 |
Download configuration | config.json |
장비코드
Text
UNIQUE
 
Distinct | 137 |
---|---|
Distinct (%) | 100.0% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
Value | Count | Frequency (%) |
fl-el10 | 1 | 0.7% |
ff-ie30 | 1 | 0.7% |
fe-mc60 | 1 | 0.7% |
fe-mc50 | 1 | 0.7% |
fe-mc40 | 1 | 0.7% |
fe-mc30 | 1 | 0.7% |
fe-mc20 | 1 | 0.7% |
fe-mc10 | 1 | 0.7% |
fe-sr10 | 1 | 0.7% |
fe-xd10 | 1 | 0.7% |
Other values (127) | 127 |
Most occurring characters
Value | Count | Frequency (%) |
F | 164 | |
- | 137 | |
0 | 137 | |
1 | 79 | 8.2% |
L | 48 | 5.0% |
C | 44 | 4.6% |
R | 41 | 4.3% |
E | 38 | 4.0% |
S | 37 | 3.9% |
B | 30 | 3.1% |
Other values (20) | 204 |
Most occurring categories
Value | Count | Frequency (%) |
Uppercase Letter | 548 | |
Decimal Number | 274 | |
Dash Punctuation | 137 | 14.3% |
Most frequent character per category
Uppercase Letter
Value | Count | Frequency (%) |
F | 164 | |
L | 48 | 8.8% |
C | 44 | 8.0% |
R | 41 | 7.5% |
E | 38 | 6.9% |
S | 37 | 6.8% |
B | 30 | 5.5% |
M | 29 | 5.3% |
P | 25 | 4.6% |
I | 19 | 3.5% |
Other values (11) | 73 |
Decimal Number
Value | Count | Frequency (%) |
0 | 137 | |
1 | 79 | |
2 | 28 | 10.2% |
3 | 14 | 5.1% |
4 | 7 | 2.6% |
6 | 4 | 1.5% |
5 | 3 | 1.1% |
7 | 2 | 0.7% |
Dash Punctuation
Value | Count | Frequency (%) |
- | 137 |
Most occurring scripts
Value | Count | Frequency (%) |
Latin | 548 | |
Common | 411 |
Most frequent character per script
Latin
Value | Count | Frequency (%) |
F | 164 | |
L | 48 | 8.8% |
C | 44 | 8.0% |
R | 41 | 7.5% |
E | 38 | 6.9% |
S | 37 | 6.8% |
B | 30 | 5.5% |
M | 29 | 5.3% |
P | 25 | 4.6% |
I | 19 | 3.5% |
Other values (11) | 73 |
Common
Value | Count | Frequency (%) |
- | 137 | |
0 | 137 | |
1 | 79 | |
2 | 28 | 6.8% |
3 | 14 | 3.4% |
4 | 7 | 1.7% |
6 | 4 | 1.0% |
5 | 3 | 0.7% |
7 | 2 | 0.5% |
Most occurring blocks
Value | Count | Frequency (%) |
ASCII | 959 |
Most frequent character per block
ASCII
Value | Count | Frequency (%) |
F | 164 | |
- | 137 | |
0 | 137 | |
1 | 79 | 8.2% |
L | 48 | 5.0% |
C | 44 | 4.6% |
R | 41 | 4.3% |
E | 38 | 4.0% |
S | 37 | 3.9% |
B | 30 | 3.1% |
Other values (20) | 204 |
장비명
Text
UNIQUE
 
Distinct | 137 |
---|---|
Distinct (%) | 100.0% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
Length
Max length | 35 |
---|---|
Median length | 25 |
Mean length | 17.985401 |
Min length | 3 |
Characters and Unicode
Total characters | 2464 |
---|---|
Distinct characters | 82 |
Distinct categories | 10 ? |
Distinct scripts | 3 ? |
Distinct blocks | 3 ? |
Unique
Unique | 137 ? |
---|---|
Unique (%) | 100.0% |
Sample
1st row | E-beam lithography I (9300) |
---|---|
2nd row | E-beam lithography II (6000) |
3rd row | Nano Imprint |
4th row | KrF Stepper |
5th row | l-line Stepper |
Value | Count | Frequency (%) |
i | 18 | 4.6% |
ii | 18 | 4.6% |
iii | 12 | 3.1% |
산업화 | 11 | 2.8% |
machine | 10 | 2.6% |
etcher | 9 | 2.3% |
r&d | 8 | 2.1% |
e-beam | 7 | 1.8% |
mocvd | 7 | 1.8% |
system | 7 | 1.8% |
Other values (167) | 281 |
Most occurring characters
Value | Count | Frequency (%) |
256 | 10.4% | |
e | 182 | 7.4% |
t | 125 | 5.1% |
I | 124 | 5.0% |
a | 123 | 5.0% |
n | 112 | 4.5% |
i | 112 | 4.5% |
r | 105 | 4.3% |
c | 87 | 3.5% |
o | 82 | 3.3% |
Other values (72) | 1156 |
Most occurring categories
Value | Count | Frequency (%) |
Lowercase Letter | 1334 | |
Uppercase Letter | 561 | |
Space Separator | 256 | 10.4% |
Close Punctuation | 71 | 2.9% |
Open Punctuation | 71 | 2.9% |
Decimal Number | 51 | 2.1% |
Other Letter | 46 | 1.9% |
Dash Punctuation | 38 | 1.5% |
Other Punctuation | 33 | 1.3% |
Letter Number | 3 | 0.1% |
Most frequent character per category
Lowercase Letter
Value | Count | Frequency (%) |
e | 182 | |
t | 125 | |
a | 123 | |
n | 112 | 8.4% |
i | 112 | 8.4% |
r | 105 | 7.9% |
c | 87 | 6.5% |
o | 82 | 6.1% |
s | 56 | 4.2% |
h | 53 | 4.0% |
Other values (14) | 297 |
Uppercase Letter
Value | Count | Frequency (%) |
I | 124 | |
D | 53 | |
M | 48 | 8.6% |
C | 43 | 7.7% |
S | 35 | 6.2% |
P | 32 | 5.7% |
A | 32 | 5.7% |
E | 31 | 5.5% |
R | 26 | 4.6% |
V | 23 | 4.1% |
Other values (13) | 114 |
Other Letter
Value | Count | Frequency (%) |
화 | 12 | |
업 | 12 | |
산 | 12 | |
시 | 1 | 2.2% |
스 | 1 | 2.2% |
측 | 1 | 2.2% |
항 | 1 | 2.2% |
저 | 1 | 2.2% |
면 | 1 | 2.2% |
정 | 1 | 2.2% |
Other values (3) | 3 | 6.5% |
Decimal Number
Value | Count | Frequency (%) |
0 | 15 | |
8 | 8 | |
6 | 7 | |
4 | 5 | 9.8% |
2 | 4 | 7.8% |
3 | 4 | 7.8% |
5 | 3 | 5.9% |
1 | 2 | 3.9% |
9 | 2 | 3.9% |
7 | 1 | 2.0% |
Other Punctuation
Value | Count | Frequency (%) |
& | 21 | |
/ | 5 | 15.2% |
, | 3 | 9.1% |
: | 2 | 6.1% |
. | 2 | 6.1% |
Letter Number
Value | Count | Frequency (%) |
Ⅲ | 1 | |
Ⅵ | 1 | |
Ⅱ | 1 |
Space Separator
Value | Count | Frequency (%) |
256 |
Close Punctuation
Value | Count | Frequency (%) |
) | 71 |
Open Punctuation
Value | Count | Frequency (%) |
( | 71 |
Dash Punctuation
Value | Count | Frequency (%) |
- | 38 |
Most occurring scripts
Value | Count | Frequency (%) |
Latin | 1898 | |
Common | 520 | 21.1% |
Hangul | 46 | 1.9% |
Most frequent character per script
Latin
Value | Count | Frequency (%) |
e | 182 | 9.6% |
t | 125 | 6.6% |
I | 124 | 6.5% |
a | 123 | 6.5% |
n | 112 | 5.9% |
i | 112 | 5.9% |
r | 105 | 5.5% |
c | 87 | 4.6% |
o | 82 | 4.3% |
s | 56 | 3.0% |
Other values (40) | 790 |
Common
Value | Count | Frequency (%) |
256 | ||
) | 71 | 13.7% |
( | 71 | 13.7% |
- | 38 | 7.3% |
& | 21 | 4.0% |
0 | 15 | 2.9% |
8 | 8 | 1.5% |
6 | 7 | 1.3% |
/ | 5 | 1.0% |
4 | 5 | 1.0% |
Other values (9) | 23 | 4.4% |
Hangul
Value | Count | Frequency (%) |
화 | 12 | |
업 | 12 | |
산 | 12 | |
시 | 1 | 2.2% |
스 | 1 | 2.2% |
측 | 1 | 2.2% |
항 | 1 | 2.2% |
저 | 1 | 2.2% |
면 | 1 | 2.2% |
정 | 1 | 2.2% |
Other values (3) | 3 | 6.5% |
Most occurring blocks
Value | Count | Frequency (%) |
ASCII | 2415 | |
Hangul | 46 | 1.9% |
Number Forms | 3 | 0.1% |
Most frequent character per block
ASCII
Value | Count | Frequency (%) |
256 | 10.6% | |
e | 182 | 7.5% |
t | 125 | 5.2% |
I | 124 | 5.1% |
a | 123 | 5.1% |
n | 112 | 4.6% |
i | 112 | 4.6% |
r | 105 | 4.3% |
c | 87 | 3.6% |
o | 82 | 3.4% |
Other values (56) | 1107 |
Hangul
Value | Count | Frequency (%) |
화 | 12 | |
업 | 12 | |
산 | 12 | |
시 | 1 | 2.2% |
스 | 1 | 2.2% |
측 | 1 | 2.2% |
항 | 1 | 2.2% |
저 | 1 | 2.2% |
면 | 1 | 2.2% |
정 | 1 | 2.2% |
Other values (3) | 3 | 6.5% |
Number Forms
Value | Count | Frequency (%) |
Ⅲ | 1 | |
Ⅵ | 1 | |
Ⅱ | 1 |
제작사
Text
Distinct | 74 |
---|---|
Distinct (%) | 54.0% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
Value | Count | Frequency (%) |
아티스 | 12 | 7.5% |
aixtron | 6 | 3.8% |
svs | 5 | 3.1% |
ulvac | 5 | 3.1% |
hitachi | 5 | 3.1% |
gatan | 4 | 2.5% |
unaxis | 4 | 2.5% |
jeol | 4 | 2.5% |
tech | 4 | 2.5% |
thermofisher | 3 | 1.9% |
Other values (78) | 107 |
Most occurring characters
Value | Count | Frequency (%) |
S | 46 | 5.4% |
t | 43 | 5.0% |
e | 42 | 4.9% |
A | 36 | 4.2% |
i | 35 | 4.1% |
a | 35 | 4.1% |
r | 33 | 3.9% |
c | 32 | 3.8% |
E | 29 | 3.4% |
o | 28 | 3.3% |
Other values (75) | 493 |
Most occurring categories
Value | Count | Frequency (%) |
Lowercase Letter | 383 | |
Uppercase Letter | 356 | |
Other Letter | 86 | 10.1% |
Space Separator | 24 | 2.8% |
Other Punctuation | 2 | 0.2% |
Dash Punctuation | 1 | 0.1% |
Most frequent character per category
Other Letter
Value | Count | Frequency (%) |
아 | 13 | |
스 | 13 | |
티 | 12 | |
성 | 4 | 4.7% |
밍 | 3 | 3.5% |
포 | 3 | 3.5% |
원 | 3 | 3.5% |
텍 | 3 | 3.5% |
노 | 2 | 2.3% |
이 | 2 | 2.3% |
Other values (26) | 28 |
Uppercase Letter
Value | Count | Frequency (%) |
S | 46 | |
A | 36 | 10.1% |
E | 29 | 8.1% |
T | 25 | 7.0% |
C | 24 | 6.7% |
L | 21 | 5.9% |
N | 20 | 5.6% |
O | 18 | 5.1% |
U | 17 | 4.8% |
M | 17 | 4.8% |
Other values (14) | 103 |
Lowercase Letter
Value | Count | Frequency (%) |
t | 43 | |
e | 42 | |
i | 35 | |
a | 35 | |
r | 33 | |
c | 32 | |
o | 28 | |
h | 26 | |
n | 24 | 6.3% |
s | 24 | 6.3% |
Other values (11) | 61 |
Other Punctuation
Value | Count | Frequency (%) |
. | 1 | |
, | 1 |
Space Separator
Value | Count | Frequency (%) |
24 |
Dash Punctuation
Value | Count | Frequency (%) |
- | 1 |
Most occurring scripts
Value | Count | Frequency (%) |
Latin | 739 | |
Hangul | 86 | 10.1% |
Common | 27 | 3.2% |
Most frequent character per script
Latin
Value | Count | Frequency (%) |
S | 46 | 6.2% |
t | 43 | 5.8% |
e | 42 | 5.7% |
A | 36 | 4.9% |
i | 35 | 4.7% |
a | 35 | 4.7% |
r | 33 | 4.5% |
c | 32 | 4.3% |
E | 29 | 3.9% |
o | 28 | 3.8% |
Other values (35) | 380 |
Hangul
Value | Count | Frequency (%) |
아 | 13 | |
스 | 13 | |
티 | 12 | |
성 | 4 | 4.7% |
밍 | 3 | 3.5% |
포 | 3 | 3.5% |
원 | 3 | 3.5% |
텍 | 3 | 3.5% |
노 | 2 | 2.3% |
이 | 2 | 2.3% |
Other values (26) | 28 |
Common
Value | Count | Frequency (%) |
24 | ||
. | 1 | 3.7% |
- | 1 | 3.7% |
, | 1 | 3.7% |
Most occurring blocks
Value | Count | Frequency (%) |
ASCII | 766 | |
Hangul | 86 | 10.1% |
Most frequent character per block
ASCII
Value | Count | Frequency (%) |
S | 46 | 6.0% |
t | 43 | 5.6% |
e | 42 | 5.5% |
A | 36 | 4.7% |
i | 35 | 4.6% |
a | 35 | 4.6% |
r | 33 | 4.3% |
c | 32 | 4.2% |
E | 29 | 3.8% |
o | 28 | 3.7% |
Other values (39) | 407 |
Hangul
Value | Count | Frequency (%) |
아 | 13 | |
스 | 13 | |
티 | 12 | |
성 | 4 | 4.7% |
밍 | 3 | 3.5% |
포 | 3 | 3.5% |
원 | 3 | 3.5% |
텍 | 3 | 3.5% |
노 | 2 | 2.3% |
이 | 2 | 2.3% |
Other values (26) | 28 |
모델명
Text
Distinct | 109 |
---|---|
Distinct (%) | 80.1% |
Missing | 1 |
Missing (%) | 0.7% |
Memory size | 1.2 KiB |
Length
Max length | 19 |
---|---|
Median length | 15 |
Mean length | 8.5514706 |
Min length | 1 |
Characters and Unicode
Total characters | 1163 |
---|---|
Distinct characters | 65 |
Distinct categories | 9 ? |
Distinct scripts | 2 ? |
Distinct blocks | 1 ? |
Unique
Unique | 96 ? |
---|---|
Unique (%) | 70.6% |
Sample
1st row | JBX9300FS |
---|---|
2nd row | JBX6000FS/E |
3rd row | Eitre-8 |
4th row | PAS5500-300C |
5th row | NSR2205-i9c |
Value | Count | Frequency (%) |
12 | 6.6% | |
co-125d-ns | 3 | 1.7% |
icp | 3 | 1.7% |
multipex | 3 | 1.7% |
vlsaline(oerlikon | 3 | 1.7% |
series | 3 | 1.7% |
msx1000 | 3 | 1.7% |
uee | 3 | 1.7% |
swp-c3d | 2 | 1.1% |
aix200/4 | 2 | 1.1% |
Other values (132) | 144 |
Most occurring characters
Value | Count | Frequency (%) |
0 | 142 | 12.2% |
- | 76 | 6.5% |
S | 68 | 5.8% |
48 | 4.1% | |
1 | 46 | 4.0% |
E | 43 | 3.7% |
2 | 40 | 3.4% |
5 | 38 | 3.3% |
M | 34 | 2.9% |
P | 34 | 2.9% |
Other values (55) | 594 |
Most occurring categories
Value | Count | Frequency (%) |
Uppercase Letter | 478 | |
Decimal Number | 343 | |
Lowercase Letter | 195 | |
Dash Punctuation | 76 | 6.5% |
Space Separator | 48 | 4.1% |
Other Punctuation | 8 | 0.7% |
Open Punctuation | 7 | 0.6% |
Close Punctuation | 7 | 0.6% |
Math Symbol | 1 | 0.1% |
Most frequent character per category
Uppercase Letter
Value | Count | Frequency (%) |
S | 68 | |
E | 43 | 9.0% |
M | 34 | 7.1% |
P | 34 | 7.1% |
A | 33 | 6.9% |
C | 31 | 6.5% |
I | 26 | 5.4% |
L | 25 | 5.2% |
D | 21 | 4.4% |
N | 19 | 4.0% |
Other values (16) | 144 |
Lowercase Letter
Value | Count | Frequency (%) |
e | 28 | |
i | 27 | |
r | 18 | |
a | 14 | 7.2% |
t | 14 | 7.2% |
o | 13 | 6.7% |
l | 13 | 6.7% |
u | 11 | 5.6% |
s | 11 | 5.6% |
c | 9 | 4.6% |
Other values (10) | 37 |
Decimal Number
Value | Count | Frequency (%) |
0 | 142 | |
1 | 46 | 13.4% |
2 | 40 | 11.7% |
5 | 38 | 11.1% |
3 | 23 | 6.7% |
6 | 15 | 4.4% |
8 | 14 | 4.1% |
4 | 12 | 3.5% |
9 | 10 | 2.9% |
7 | 3 | 0.9% |
Other Punctuation
Value | Count | Frequency (%) |
/ | 5 | |
? | 1 | 12.5% |
& | 1 | 12.5% |
, | 1 | 12.5% |
Dash Punctuation
Value | Count | Frequency (%) |
- | 76 |
Space Separator
Value | Count | Frequency (%) |
48 |
Open Punctuation
Value | Count | Frequency (%) |
( | 7 |
Close Punctuation
Value | Count | Frequency (%) |
) | 7 |
Math Symbol
Value | Count | Frequency (%) |
+ | 1 |
Most occurring scripts
Value | Count | Frequency (%) |
Latin | 673 | |
Common | 490 |
Most frequent character per script
Latin
Value | Count | Frequency (%) |
S | 68 | 10.1% |
E | 43 | 6.4% |
M | 34 | 5.1% |
P | 34 | 5.1% |
A | 33 | 4.9% |
C | 31 | 4.6% |
e | 28 | 4.2% |
i | 27 | 4.0% |
I | 26 | 3.9% |
L | 25 | 3.7% |
Other values (36) | 324 |
Common
Value | Count | Frequency (%) |
0 | 142 | |
- | 76 | |
48 | 9.8% | |
1 | 46 | 9.4% |
2 | 40 | 8.2% |
5 | 38 | 7.8% |
3 | 23 | 4.7% |
6 | 15 | 3.1% |
8 | 14 | 2.9% |
4 | 12 | 2.4% |
Other values (9) | 36 | 7.3% |
Most occurring blocks
Value | Count | Frequency (%) |
ASCII | 1163 |
Most frequent character per block
ASCII
Value | Count | Frequency (%) |
0 | 142 | 12.2% |
- | 76 | 6.5% |
S | 68 | 5.8% |
48 | 4.1% | |
1 | 46 | 4.0% |
E | 43 | 3.7% |
2 | 40 | 3.4% |
5 | 38 | 3.3% |
M | 34 | 2.9% |
P | 34 | 2.9% |
Other values (55) | 594 |
담당자
Categorical
HIGH CORRELATION
 
Distinct | 31 |
---|---|
Distinct (%) | 22.6% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
이지선 | |
---|---|
이용수 | |
강대훈 | 9 |
장민철 | 8 |
강세민 | 7 |
Other values (26) |
Length
Max length | 3 |
---|---|
Median length | 3 |
Mean length | 3 |
Min length | 3 |
Unique
Unique | 6 ? |
---|---|
Unique (%) | 4.4% |
Sample
1st row | 김영재 |
---|---|
2nd row | 김영재 |
3rd row | 김영재 |
4th row | 황선용 |
5th row | 장민철 |
Common Values
Value | Count | Frequency (%) |
이지선 | 10 | 7.3% |
이용수 | 10 | 7.3% |
강대훈 | 9 | 6.6% |
장민철 | 8 | 5.8% |
강세민 | 7 | 5.1% |
고유민 | 7 | 5.1% |
송근만 | 7 | 5.1% |
이병오 | 6 | 4.4% |
허종곤 | 5 | 3.6% |
김현웅 | 5 | 3.6% |
Other values (21) | 63 |
Length
Value | Count | Frequency (%) |
이지선 | 10 | 7.3% |
이용수 | 10 | 7.3% |
강대훈 | 9 | 6.6% |
장민철 | 8 | 5.8% |
강세민 | 7 | 5.1% |
고유민 | 7 | 5.1% |
송근만 | 7 | 5.1% |
이병오 | 6 | 4.4% |
김영재 | 5 | 3.6% |
조명주 | 5 | 3.6% |
Other values (21) | 63 |
기판종류(Si)
Categorical
HIGH CORRELATION
  IMBALANCE
 
Distinct | 2 |
---|---|
Distinct (%) | 1.5% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
X |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | O |
5th row | O |
Common Values
Value | Count | Frequency (%) |
O | 124 | |
X | 13 | 9.5% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 124 | |
x | 13 | 9.5% |
기판종류(III-V)
Categorical
HIGH CORRELATION
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
△ | |
X |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | △ |
5th row | O |
Common Values
Value | Count | Frequency (%) |
O | 104 | |
△ | 22 | 16.1% |
X | 11 | 8.0% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 104 | |
△ | 22 | 16.1% |
x | 11 | 8.0% |
기판종류(Glass)
Categorical
HIGH CORRELATION
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
X | |
△ |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | O |
5th row | △ |
Common Values
Value | Count | Frequency (%) |
O | 99 | |
X | 27 | 19.7% |
△ | 11 | 8.0% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 99 | |
x | 27 | 19.7% |
△ | 11 | 8.0% |
기판종류(Flex)
Categorical
HIGH CORRELATION
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
X | |
---|---|
△ | |
O |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | △ |
---|---|
2nd row | △ |
3rd row | O |
4th row | X |
5th row | △ |
Common Values
Value | Count | Frequency (%) |
X | 64 | |
△ | 43 | |
O | 30 |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
x | 64 | |
△ | 43 | |
o | 30 |
기판크기(조각)
Categorical
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
X | |
△ | 8 |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | X |
5th row | X |
Common Values
Value | Count | Frequency (%) |
O | 89 | |
X | 40 | |
△ | 8 | 5.8% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 89 | |
x | 40 | |
△ | 8 | 5.8% |
기판크기(2인치)
Categorical
HIGH CORRELATION
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
X | |
△ | 3 |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | X |
5th row | △ |
Common Values
Value | Count | Frequency (%) |
O | 100 | |
X | 34 | 24.8% |
△ | 3 | 2.2% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 100 | |
x | 34 | 24.8% |
△ | 3 | 2.2% |
기판크기(4인치)
Categorical
HIGH CORRELATION
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
X | |
△ | 6 |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | △ |
5th row | △ |
Common Values
Value | Count | Frequency (%) |
O | 95 | |
X | 36 | 26.3% |
△ | 6 | 4.4% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 95 | |
x | 36 | 26.3% |
△ | 6 | 4.4% |
기판크기(6인치)
Categorical
HIGH CORRELATION
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
X | |
△ | 2 |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | △ |
5th row | O |
Common Values
Value | Count | Frequency (%) |
O | 100 | |
X | 35 | 25.5% |
△ | 2 | 1.5% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 100 | |
x | 35 | 25.5% |
△ | 2 | 1.5% |
기판크기(8인치)
Categorical
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
X | |
---|---|
O | |
△ | 7 |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | O |
5th row | △ |
Common Values
Value | Count | Frequency (%) |
X | 73 | |
O | 57 | |
△ | 7 | 5.1% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
x | 73 | |
o | 57 | |
△ | 7 | 5.1% |
기판크기(12인치)
Categorical
HIGH CORRELATION
  IMBALANCE
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
X | |
---|---|
O | 5 |
△ | 2 |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | X |
---|---|
2nd row | X |
3rd row | X |
4th row | X |
5th row | X |
Common Values
Value | Count | Frequency (%) |
X | 130 | |
O | 5 | 3.6% |
△ | 2 | 1.5% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
x | 130 | |
o | 5 | 3.6% |
△ | 2 | 1.5% |
기판유형(플랫)
Categorical
HIGH CORRELATION
  IMBALANCE
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
X | |
△ | 1 |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 1 ? |
---|---|
Unique (%) | 0.7% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | O |
5th row | O |
Common Values
Value | Count | Frequency (%) |
O | 117 | |
X | 19 | 13.9% |
△ | 1 | 0.7% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 117 | |
x | 19 | 13.9% |
△ | 1 | 0.7% |
기판유형(노치)
Categorical
HIGH CORRELATION
 
Distinct | 3 |
---|---|
Distinct (%) | 2.2% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O | |
---|---|
X | |
△ | 7 |
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | O |
5th row | X |
Common Values
Value | Count | Frequency (%) |
O | 101 | |
X | 29 | 21.2% |
△ | 7 | 5.1% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 101 | |
x | 29 | 21.2% |
△ | 7 | 5.1% |
기판두께(Normal)
Categorical
CONSTANT
 
Distinct | 1 |
---|---|
Distinct (%) | 0.7% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
O |
---|
Length
Max length | 1 |
---|---|
Median length | 1 |
Mean length | 1 |
Min length | 1 |
Unique
Unique | 0 ? |
---|---|
Unique (%) | 0.0% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | O |
5th row | O |
Common Values
Value | Count | Frequency (%) |
O | 137 |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
o | 137 |
기판두께(Special)
Categorical
Distinct | 5 |
---|---|
Distinct (%) | 3.6% |
Missing | 0 |
Missing (%) | 0.0% |
Memory size | 1.2 KiB |
△ | |
---|---|
X | |
O | |
1T | 7 |
2T | 1 |
Length
Max length | 2 |
---|---|
Median length | 1 |
Mean length | 1.0583942 |
Min length | 1 |
Unique
Unique | 1 ? |
---|---|
Unique (%) | 0.7% |
Sample
1st row | O |
---|---|
2nd row | O |
3rd row | O |
4th row | 1T |
5th row | 1T |
Common Values
Value | Count | Frequency (%) |
△ | 77 | |
X | 44 | |
O | 8 | 5.8% |
1T | 7 | 5.1% |
2T | 1 | 0.7% |
Length
Common Values (Plot)
Value | Count | Frequency (%) |
△ | 77 | |
x | 44 | |
o | 8 | 5.8% |
1t | 7 | 5.1% |
2t | 1 | 0.7% |
제작사 | 담당자 | 기판종류(Si) | 기판종류(III-V) | 기판종류(Glass) | 기판종류(Flex) | 기판크기(조각) | 기판크기(2인치) | 기판크기(4인치) | 기판크기(6인치) | 기판크기(8인치) | 기판크기(12인치) | 기판유형(플랫) | 기판유형(노치) | 기판두께(Special) | |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
제작사 | 1.000 | 0.981 | 0.964 | 0.934 | 0.965 | 0.955 | 0.868 | 0.960 | 0.932 | 0.955 | 0.724 | 0.516 | 0.392 | 0.927 | 0.958 |
담당자 | 0.981 | 1.000 | 0.616 | 0.780 | 0.815 | 0.871 | 0.756 | 0.875 | 0.848 | 0.782 | 0.518 | 0.885 | 0.970 | 0.876 | 0.798 |
기판종류(Si) | 0.964 | 0.616 | 1.000 | 0.109 | 0.323 | 0.131 | 0.041 | 0.000 | 0.000 | 0.106 | 0.101 | 0.000 | 0.000 | 0.183 | 0.218 |
기판종류(III-V) | 0.934 | 0.780 | 0.109 | 1.000 | 0.616 | 0.429 | 0.591 | 0.259 | 0.080 | 0.481 | 0.463 | 0.000 | 0.250 | 0.341 | 0.000 |
기판종류(Glass) | 0.965 | 0.815 | 0.323 | 0.616 | 1.000 | 0.641 | 0.380 | 0.718 | 0.674 | 0.400 | 0.000 | 0.466 | 0.000 | 0.559 | 0.211 |
기판종류(Flex) | 0.955 | 0.871 | 0.131 | 0.429 | 0.641 | 1.000 | 0.673 | 0.447 | 0.533 | 0.536 | 0.653 | 0.000 | 0.654 | 0.582 | 0.382 |
기판크기(조각) | 0.868 | 0.756 | 0.041 | 0.591 | 0.380 | 0.673 | 1.000 | 0.808 | 0.629 | 0.256 | 0.306 | 0.454 | 0.178 | 0.785 | 0.322 |
기판크기(2인치) | 0.960 | 0.875 | 0.000 | 0.259 | 0.718 | 0.447 | 0.808 | 1.000 | 0.930 | 0.585 | 0.315 | 0.686 | 0.535 | 0.711 | 0.346 |
기판크기(4인치) | 0.932 | 0.848 | 0.000 | 0.080 | 0.674 | 0.533 | 0.629 | 0.930 | 1.000 | 0.839 | 0.455 | 0.629 | 0.769 | 0.783 | 0.470 |
기판크기(6인치) | 0.955 | 0.782 | 0.106 | 0.481 | 0.400 | 0.536 | 0.256 | 0.585 | 0.839 | 1.000 | 0.438 | 0.000 | 0.709 | 0.663 | 0.379 |
기판크기(8인치) | 0.724 | 0.518 | 0.101 | 0.463 | 0.000 | 0.653 | 0.306 | 0.315 | 0.455 | 0.438 | 1.000 | 0.518 | 0.463 | 0.599 | 0.270 |
기판크기(12인치) | 0.516 | 0.885 | 0.000 | 0.000 | 0.466 | 0.000 | 0.454 | 0.686 | 0.629 | 0.000 | 0.518 | 1.000 | 0.000 | 0.487 | 0.361 |
기판유형(플랫) | 0.392 | 0.970 | 0.000 | 0.250 | 0.000 | 0.654 | 0.178 | 0.535 | 0.769 | 0.709 | 0.463 | 0.000 | 1.000 | 0.826 | 0.473 |
기판유형(노치) | 0.927 | 0.876 | 0.183 | 0.341 | 0.559 | 0.582 | 0.785 | 0.711 | 0.783 | 0.663 | 0.599 | 0.487 | 0.826 | 1.000 | 0.335 |
기판두께(Special) | 0.958 | 0.798 | 0.218 | 0.000 | 0.211 | 0.382 | 0.322 | 0.346 | 0.470 | 0.379 | 0.270 | 0.361 | 0.473 | 0.335 | 1.000 |
기판종류(III-V) | 기판크기(8인치) | 기판유형(노치) | 기판종류(Flex) | 기판두께(Special) | 기판크기(2인치) | 기판크기(4인치) | 기판크기(6인치) | 기판유형(플랫) | 기판종류(Glass) | 담당자 | 기판크기(조각) | 기판종류(Si) | 기판크기(12인치) | |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
기판종류(III-V) | 1.000 | 0.181 | 0.118 | 0.162 | 0.000 | 0.084 | 0.021 | 0.191 | 0.080 | 0.284 | 0.504 | 0.265 | 0.179 | 0.000 |
기판크기(8인치) | 0.181 | 1.000 | 0.271 | 0.314 | 0.209 | 0.107 | 0.176 | 0.167 | 0.181 | 0.000 | 0.270 | 0.103 | 0.166 | 0.214 |
기판유형(노치) | 0.118 | 0.271 | 1.000 | 0.258 | 0.266 | 0.367 | 0.445 | 0.323 | 0.498 | 0.241 | 0.625 | 0.447 | 0.300 | 0.195 |
기판종류(Flex) | 0.162 | 0.314 | 0.258 | 1.000 | 0.311 | 0.172 | 0.224 | 0.226 | 0.315 | 0.304 | 0.618 | 0.332 | 0.215 | 0.000 |
기판두께(Special) | 0.000 | 0.209 | 0.266 | 0.311 | 1.000 | 0.277 | 0.399 | 0.307 | 0.403 | 0.160 | 0.471 | 0.254 | 0.263 | 0.290 |
기판크기(2인치) | 0.084 | 0.107 | 0.367 | 0.172 | 0.277 | 1.000 | 0.677 | 0.260 | 0.225 | 0.374 | 0.624 | 0.475 | 0.000 | 0.344 |
기판크기(4인치) | 0.021 | 0.176 | 0.445 | 0.224 | 0.399 | 0.677 | 1.000 | 0.516 | 0.428 | 0.333 | 0.586 | 0.294 | 0.000 | 0.294 |
기판크기(6인치) | 0.191 | 0.167 | 0.323 | 0.226 | 0.307 | 0.260 | 0.516 | 1.000 | 0.365 | 0.147 | 0.506 | 0.082 | 0.174 | 0.000 |
기판유형(플랫) | 0.080 | 0.181 | 0.498 | 0.315 | 0.403 | 0.225 | 0.428 | 0.365 | 1.000 | 0.000 | 0.800 | 0.054 | 0.000 | 0.000 |
기판종류(Glass) | 0.284 | 0.000 | 0.241 | 0.304 | 0.160 | 0.374 | 0.333 | 0.147 | 0.000 | 1.000 | 0.544 | 0.136 | 0.516 | 0.183 |
담당자 | 0.504 | 0.270 | 0.625 | 0.618 | 0.471 | 0.624 | 0.586 | 0.506 | 0.800 | 0.544 | 1.000 | 0.477 | 0.469 | 0.639 |
기판크기(조각) | 0.265 | 0.103 | 0.447 | 0.332 | 0.254 | 0.475 | 0.294 | 0.082 | 0.054 | 0.136 | 0.477 | 1.000 | 0.067 | 0.175 |
기판종류(Si) | 0.179 | 0.166 | 0.300 | 0.215 | 0.263 | 0.000 | 0.000 | 0.174 | 0.000 | 0.516 | 0.469 | 0.067 | 1.000 | 0.000 |
기판크기(12인치) | 0.000 | 0.214 | 0.195 | 0.000 | 0.290 | 0.344 | 0.294 | 0.000 | 0.000 | 0.183 | 0.639 | 0.175 | 0.000 | 1.000 |
담당자 | 기판종류(Si) | 기판종류(III-V) | 기판종류(Glass) | 기판종류(Flex) | 기판크기(조각) | 기판크기(2인치) | 기판크기(4인치) | 기판크기(6인치) | 기판크기(8인치) | 기판크기(12인치) | 기판유형(플랫) | 기판유형(노치) | 기판두께(Special) | |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
담당자 | 1.000 | 0.469 | 0.504 | 0.544 | 0.618 | 0.477 | 0.624 | 0.586 | 0.506 | 0.270 | 0.639 | 0.800 | 0.625 | 0.471 |
기판종류(Si) | 0.469 | 1.000 | 0.179 | 0.516 | 0.215 | 0.067 | 0.000 | 0.000 | 0.174 | 0.166 | 0.000 | 0.000 | 0.300 | 0.263 |
기판종류(III-V) | 0.504 | 0.179 | 1.000 | 0.284 | 0.162 | 0.265 | 0.084 | 0.021 | 0.191 | 0.181 | 0.000 | 0.080 | 0.118 | 0.000 |
기판종류(Glass) | 0.544 | 0.516 | 0.284 | 1.000 | 0.304 | 0.136 | 0.374 | 0.333 | 0.147 | 0.000 | 0.183 | 0.000 | 0.241 | 0.160 |
기판종류(Flex) | 0.618 | 0.215 | 0.162 | 0.304 | 1.000 | 0.332 | 0.172 | 0.224 | 0.226 | 0.314 | 0.000 | 0.315 | 0.258 | 0.311 |
기판크기(조각) | 0.477 | 0.067 | 0.265 | 0.136 | 0.332 | 1.000 | 0.475 | 0.294 | 0.082 | 0.103 | 0.175 | 0.054 | 0.447 | 0.254 |
기판크기(2인치) | 0.624 | 0.000 | 0.084 | 0.374 | 0.172 | 0.475 | 1.000 | 0.677 | 0.260 | 0.107 | 0.344 | 0.225 | 0.367 | 0.277 |
기판크기(4인치) | 0.586 | 0.000 | 0.021 | 0.333 | 0.224 | 0.294 | 0.677 | 1.000 | 0.516 | 0.176 | 0.294 | 0.428 | 0.445 | 0.399 |
기판크기(6인치) | 0.506 | 0.174 | 0.191 | 0.147 | 0.226 | 0.082 | 0.260 | 0.516 | 1.000 | 0.167 | 0.000 | 0.365 | 0.323 | 0.307 |
기판크기(8인치) | 0.270 | 0.166 | 0.181 | 0.000 | 0.314 | 0.103 | 0.107 | 0.176 | 0.167 | 1.000 | 0.214 | 0.181 | 0.271 | 0.209 |
기판크기(12인치) | 0.639 | 0.000 | 0.000 | 0.183 | 0.000 | 0.175 | 0.344 | 0.294 | 0.000 | 0.214 | 1.000 | 0.000 | 0.195 | 0.290 |
기판유형(플랫) | 0.800 | 0.000 | 0.080 | 0.000 | 0.315 | 0.054 | 0.225 | 0.428 | 0.365 | 0.181 | 0.000 | 1.000 | 0.498 | 0.403 |
기판유형(노치) | 0.625 | 0.300 | 0.118 | 0.241 | 0.258 | 0.447 | 0.367 | 0.445 | 0.323 | 0.271 | 0.195 | 0.498 | 1.000 | 0.266 |
기판두께(Special) | 0.471 | 0.263 | 0.000 | 0.160 | 0.311 | 0.254 | 0.277 | 0.399 | 0.307 | 0.209 | 0.290 | 0.403 | 0.266 | 1.000 |
장비코드 | 장비명 | 제작사 | 모델명 | 담당자 | 기판종류(Si) | 기판종류(III-V) | 기판종류(Glass) | 기판종류(Flex) | 기판크기(조각) | 기판크기(2인치) | 기판크기(4인치) | 기판크기(6인치) | 기판크기(8인치) | 기판크기(12인치) | 기판유형(플랫) | 기판유형(노치) | 기판두께(Normal) | 기판두께(Special) | |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
0 | FL-EL10 | E-beam lithography I (9300) | JEOL | JBX9300FS | 김영재 | O | O | O | △ | O | O | O | O | O | X | O | O | O | O |
1 | FL-EL20 | E-beam lithography II (6000) | JEOL | JBX6000FS/E | 김영재 | O | O | O | △ | O | O | O | O | O | X | O | O | O | O |
2 | FL-NI10 | Nano Imprint | Obducat | Eitre-8 | 김영재 | O | O | O | O | O | O | O | O | O | X | O | O | O | O |
3 | FL-ST10 | KrF Stepper | ASML | PAS5500-300C | 황선용 | O | △ | O | X | X | X | △ | △ | O | X | O | O | O | 1T |
4 | FL-ST20 | l-line Stepper | NIKON | NSR2205-i9c | 장민철 | O | O | △ | △ | X | △ | △ | O | △ | X | O | X | O | 1T |
5 | FL-CA10 | Automated Mask Aligner I | SUSS Microtec | MA150e | 강대훈 | O | △ | O | X | X | X | O | O | X | X | O | O | O | X |
6 | FL-CA40 | Automated Mask Aligner II | SUSS Microtec | MA150e | 강대훈 | O | △ | O | X | X | O | X | X | X | X | O | O | O | X |
7 | FL-CA30 | Contact Aligner I (Manual) | EVGroup | EVG620 | 강대훈 | O | O | O | △ | O | O | O | O | △ | X | O | O | O | X |
8 | FL-CA50 | Contact Aligner III (Manual, 8inch) | 솔하이텍 | SHA-80SA | 강세민 | O | O | O | △ | X | X | X | X | O | X | O | O | O | X |
9 | FL-CA60 | Automated Mask Aligner III (8 inch) | 우시오 | UX-3200SC | 장민철 | O | O | O | △ | X | X | X | X | O | X | O | O | O | X |
장비코드 | 장비명 | 제작사 | 모델명 | 담당자 | 기판종류(Si) | 기판종류(III-V) | 기판종류(Glass) | 기판종류(Flex) | 기판크기(조각) | 기판크기(2인치) | 기판크기(4인치) | 기판크기(6인치) | 기판크기(8인치) | 기판크기(12인치) | 기판유형(플랫) | 기판유형(노치) | 기판두께(Normal) | 기판두께(Special) | |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
127 | FC-MT10 | Microtome | Leica | MT990 | 조명주 | X | X | X | O | O | X | X | X | X | X | X | X | O | X |
128 | FC-XP10 | XPS | ThermoFisher | NEXSA | 최영수 | O | O | O | O | O | X | X | X | X | X | X | X | O | △ |
129 | FS-DC10 | DC measurement system | FormFactor, Keysight | TESLA200, B1505A | 박덕수 | O | O | O | △ | O | O | O | O | O | X | O | O | O | △ |
130 | FS-FI10 | FIB Ⅲ | ThermoFisher | Helios 5 UX | 곽상희 | O | O | O | O | O | O | O | O | O | X | O | O | O | X |
131 | FS-AL10 | ALD-Metals | NCD | Lucida M300PL-M | 정해용 | O | O | △ | △ | △ | △ | △ | O | O | O | O | △ | O | △ |
132 | FS-AL20 | ALD-Insulators | NCD | Lucida M300PL-O | 정해용 | O | O | △ | △ | △ | △ | △ | O | O | O | O | △ | O | △ |
133 | FS-WS10 | Wet Station (HF/Acid) | 썬패치테크노 | SUN-L19-11 | 황선용 | O | △ | O | X | X | X | X | △ | O | X | O | O | O | △ |
134 | FS-BC10 | Wafer backside cleaner | 이노맥스 | ASTRO2013AWB1NN | 황선용 | O | X | X | X | X | X | X | X | O | X | O | O | O | X |
135 | FS-SR10 | 4 point probe (면저항 측정 시스템) | AIM | AFP-300 | 김재무 | O | O | O | X | O | O | O | O | O | O | O | O | O | △ |
136 | FS-EM10 | Automatic Ellipsometer | AIM | AE-86 | 심재필 | O | △ | △ | X | X | X | △ | O | O | △ | O | O | O | △ |